|
MATERIALS
Silicon and Related Materials
Prof Toshiyuki Tsuchiya
Kyoto University, Japan
Compound Semiconductors
Prof H Hillmer
University of Kassel, Germany
Dr Dharmarasu Nethaji
University of Kassel, Germany
Metals and Alloys
Dr Akira Ishida
National Institute for Materials Science, Japan
Prof Kazuki Takashima
Kumamoto University, Japan
Polymers
Dr Ravi Selvaganapathy
McMaster University, Canada
Biocompatibility of Microsystems
Prof Jurgen Rühe
IMTEK, University of Freiburg, Germany
Prof Markus Biesalski
IMTEK, University of Freiburg, Germany
Harsh Environment Materials
Prof Erhard Kohn
University of Ulm, Germany
>>Back to top
FABRICATION AND PACKAGING
Wet Etching
Prof Kazuo Sato
Nagoya University, Japan
Prof Mitsuhiro Shikida
Nagoya University, Japan
Dry Etching
Dr Franz Laermer
Robert Bosch GmbH, Germany
Wafer Bonding
Dr Khalil Najafi
University of Michigan, USA
Dr Timothy J Harpster
University of Michigan, USA
Dr Warren C Welch III
University of Michigan, USA
Dr Steve Hanseup Kim
University of Michigan, USA
Dr Jay S Mitchell
University of Michigan, USA
Electrodeposition
Dr Matthew W Losey
Touchdown Technologies Inc., USA
Dr James Kelly
IBM/ T.J. Watson Research Center, USA
LIGA
Prof Ulrike Wallrabe
IMTEK, University of Freiburg, Germany
Prof Jan Korvink
IMTEK, University of Freiburg, Germany
Dr Juergen Mohr
Forschungszentrum Karlsruhe, Germany
Low-Cost MEMS Technologies
Prof Bruce Gale
University of Utah, USA
Dr Scott O. Sundberg
University of Utah, USA
Dr Mark Eddings
University of Utah, USA
Dr Andrew Hatch
University of Utah, USA
Dr Tammy Ho
University of Utah, USA
Dr JungKyu Kim
University of Utah, USA
Micromachining
Prof Dr Holger Reinecke
HSG-IMIT e.V., Institutsleitung, Germany
Dr Claas Müller
IMTEK, University of Freiburg, Germany
Self-Assembly
Prof Karl Böhringer
University of Washington, USA
Dr Jiandong Fang
University of Washington, USA
Packaging
Prof Oliver Brand
Georgia Tech, USA
>>Back to top
ELECTRONICS AND SYSTEMS DESIGN
Interface Circuits
Prof Yiannos Manoli
IMTEK, University of Freiburg, Germany
Dr A Buhmann
IMTEK, University of Freiburg, Germany
Prof Maurits Ortmanns
IMTEK, University of Freiburg, Germany
Testing, Calibration and Compensation
Prof Juergen Wilde
IMTEK, University of Freiburg, Germany
Prof Leonhard Reindl
IMTEK, University of Freiburg, Germany
Dr Craig Stewart
Cascade Microtech Europe Ltd, UK
Multiphysics and Multiscale Simulation
Prof Jan Korvink
IMTEK, University of Freiburg, Germany
Systematic Synthesis Methods
Prof G K Ananthasuresh
Indian Institute of Science, India
>>Back to top
ACTUATION MECHANISM
Electrostatic Actuation
Prof Hiroshi Toshiyoshi
University of Tokyo, Japan
Magnetic Actuation
Prof Chong Ahn
University of Cincinnati, USA
Prof Kwang W Oh
SUNY-Buffalo, USA
Thermal Actuation
Dr Long Que
GE Global Research Center, USA
PHYSICAL SENSING
Pressure Sensors
Dr Andrew DeHennis
Sensors for Medicine and Science, Inc., USA
Dr Junseok Chae
Arizona State University, USA
Accelerometers
Dr Huikai Xie
University of Florida, USA
Dr Gary K. Fedder
Carnegie Mellon University, USA
[sub title] Vibrating Gyroscopes
Prof Farrokh Ayazi
Georgia Tech, USA
Flow Sensors
Prof Göran Stemme
KTH, Sweden
Dr Sjoerd Haasl
IMEGO AB, Sweden
>>Back to top
CHEMICAL AND BIOLOGICAL SYSTEMS
Gas Micropumps
Dr Steve Hanseup Kim
EECS Department, USA
Dr Luis Bernal
Aerospace Engineering, USA
Dr Khalil Najafi
University of Michigan, USA
Liquid Micropumps
Prof Shuichi Shoji
Waseda University, Japan
Dr Hironobu Sato
Waseda University, Japan
Prof Roland Zengerle
University of Freiburg, Germany
Mixers
Prof Shizhi Qian
University of Nevada Las Vegas, USA
Dr Jérôme Duval
Nancy-University, France
Gas Sensors
Dr Ulrich Bonne
SM&D Assoc., USA
Chemical Sensors
Prof R Brown
University of Utah, USA
Dr Timothy D Strong
Sensicore, Inc., USA
Dr Steven M Martin
Intel Corporation, USA
Dr Robert K Franklin
The University of Michigan, USA
Microfluidic for Lab-On-a-Chip
Prof Roland Zengerle
University of Freiburg, Germany
Ultrasonic Transduction
Prof B Khuri-Yakub
Stanford University, USA
Dr A S Ergan
Stanford University, USA
Dr G Yaraliogu
Stanford University, USA
Dr O Oralkan
Stanford University, USA
Tissue Engineering
Dr Jeffrey T Borenstein
Draper Labs, USA
>>Back to top
OPTICAL SYSTEMS
Micro-Mirrors
Prof K Hane
Tohoku University, Japan
Prof Minoru Sasaki
Tohoku University, Japan
Diffractive and Defractive Micro-optics
Prof Stefan Sinzinger
Technische Universität Ilmenau, Germany
Photonic crystals
Prof Susumu Noda
Kyoto University, Japan
IR Imaging
Prof Masafumi Kimata
Ritsumeikan University, Japan
Integrated Optics
Prof Toshiaki Suhara
Osaka University, Japan
Artificial Retinas
Prof Dr Wilfried Mokwa
RWTH Aachen, Germany
Optical Communications
Prof Dan Marom
Hebrew University, Israel
Micro-Imaging Systems
Dr Christine Harendt
Institut für Mikroelektronik Stuttgart (ims-chips),
Germany
Mr Heinz-Gerd Graf
nstitut für Mikroelektronik Stuttgart (ims-chips),
Germany
Biophotonics
Prof Hans Zappe
IMTEK, University of Freiburg, Germany
Dr Wolfgang Mönch
IMTEK, University of Freiburg, Germany
>>Back to top
INDUSTRIAL APPLICATIONS
RF MEMS
Prof John Papapolymerou
Georgia Institute of Technology, USA
Mr Nickolas Kingsley
Georgia Institute of Technology, USA
Ink Jets
Prof Joachim Heinzl
TU Minich, Germany
Automotive Applications
Dr N Kawahara
Georgia Institute of Technology, Japan
Environmental Monitoring
Prof T Korenaga
Tokyo Metropolitan University, Japan
Medical Applications
Dr Sarah Audet
Medtronic Inc., USA
Dr Erik J Herrmann
Medtronic, Inc., USA
Dr Rogier Receveur
Medtronic, Inc, Netherlands
Dr James Carney
Medtronic, Inc, USA
Dr Greg Haubrich
Medtronic, Inc., USA
Dr Erik Scott
Medtronic, Inc., USA
Dr Glen Vaughn
Medtronic, Inc., USA
>>Back to top
EMERGING TOPICS
Micro-Combustion
Prof Ian A Waitz
Massachusetts Institute of Technology, USA
Dr Christopher M Spadaccini
Lawrence Livermore National Laboratory, USA
Micro-Coolers
Prof Mark Shannon
University of Illinois, USA
Resonators, Oscillators, and Frequency
References
Dr Wan-Thai Hsu
Discera Inc., USA
MEMS Atomic Clocks
Dr Svenja Knappe
NIST, USA
Micro-Fuel Cells
Dr Christopher Hebling
Fraunhofer ISE, Germany
Dr Lisbeth Rochlitz
Fraunhofer Institute for Solar Energy Systems,
Germany
Dr Thomas Aicher
Fraunhofer Institute for Solar Energy Systems,
Germany
Dr Christoph Ziegler
Fraunhofer Institute for Solar Energy Systems
ISE, Germany
Molecular Machine-Based NEMS
Prof Tony Jun Huang
Pennsylvania State University, USA >>Back to top |
